Introduction to Precision Science and Technology

Yuji KUWAHARA (Graduate School of Engineering)

Cource Objective
   "Manufacturing" at the atomic or molecular scale, is required by advanced technology when considering the future development of our society. Current technology is needed to fabricate an atomically flat surface or a structure controlled at the nanometer order, so called Nano-technology. In particular, the development of a new manufacturing technology, or so-called "Atomistic fabrication technology" is necessary, which would be able to utilize a high level of physical or chemical phenomena related to the fabrication process, by deeply understanding them from an atomic or electronic viewpoint. This new research area, which supports the development of "Atomistic fabrication technology", is termed "Precision science". This course gives a flavor of this field in plain words.

Requirement / Prerequisite
   No Former experience in this field is required.

Course Content
   This course covers the following topics: Novel theories of solid state physics, material and device physics, microscopic measurement and fabrication, surface science and technology, applied optics and spectroscopy, and their application to modern technologies.

Class Plan
   (not reflecting the order of lectures)

• Introduction to Advanced Electronic Devices Prof. Watanabe
• Thin Solid Films and Plasma Processes Prof. Kakiuchi
• New Formation Process of Solar Grade Si Materials Prof. Yasutake
• Electronic/Optical Properties in Organic Nanosystems Prof. Kuwahara
• Fabrication and Applications of Micro Electro Mechanical Systems Prof. Kawai
• Coherent X-ray Imaging: Basics and Applications Prof. Takahashi
• Frontiers of Semiconductor Surface Science Prof. Arima
• Optics in Our Backyard: Coloration and Nano-Science Prof. Saito
• Optical Measurement Prof. Nakano
• Nano-Profiler for High-Accuracy Free Form Mirror Devices Prof. Endo
• Damage-Free Machining of Semiconductor Materials Prof. Sano
• Atmospheric Pressure Plasma Technology for Ultraprecise Fabrication Prof. Yamamura
• X-ray Imaging of Crystalline and Non-Crystalline Materials Prof. Shimura

Textbooks
   None
   As a guide, see our HP:
   http://www.prec.eng.osaka-u.ac.jp/psthomepage/eng/index.html

Grading Policy

• Participation in class 30%
• Submission of short reports for every lecture 70%