07s-10
PRECISION SCIENCE AND TECHNOLOGY

Kazuto YAMAUCHI, et al. (School of Engineering)

Objective
  This course will introduce various aspects of precision science and technology from the School / Graduate School of Engineering, Osaka University and will expand into subject matters of current interest. The course is appropriate for students who are interested in atomic scale engineering at solid surfaces.

Lecture Outline
  1. Introduction to Semiconductor Materials
    Prof. Kiyoshi YASUTAKE
  2. Semiconductor Devices and Processes
    Prof. Mizuho MORITA, Assistant Prof. Kenta ARIMA
  3. Advanced LSI Technology
    Associate Prof. Heiji WATANABE
  4. Atomic and Electronic Structure of Solid Surfaces
    Prof. Katsuyoshi ENDO
  5. Thin Solid Films and Processes
    Associate Prof. Hiroaki KAKIUCHI
  6. Optical Measurement (Part I)
    Prof. Toshihiko KATAOKA, Assistant Prof. Yasushi Oshikane
  7. Optical Measurement (Part II)
    Associate Prof. Motohiro NAKANO
  8. Introduction to Synchrotron Radiation
    Associate Prof. Yuji KUWAHARA, Assistant Prof. Akira Saito
  9. Hard X-ray Nanobeam Formation and Application to Nanoscopy/Spectroscopy
    Prof. Kazuto YAMAUCHI
  10. Applied Plasma Processing
    Associate Prof. Kazuya YAMAMURA
  11. Ultraprecision Machining of Semiconductor Substrate
    Associate Prof. Yasuhisa SANO
  12. First-Principles Molecular-Dynamics Simulations of Ultraprecision Machining Processes
    Associate Prof. Hidekazu GOTO

Textbook
  No particular textbook will be used.

Grading
  Class participation 50%
  Term paper 50